Mitutoyo QUICK SCOPE 359 SERIES User Manual download pdf (Page 22)

M-NanoCoord

This newly developed 3D CNC ultra-high resolution measuring system is capable of the most pre-

cise movements, giving you unsurpassed form measurement accuracy in the nanometre region.

The M-NanoCoord offers you the following benefits:

•

Laser Holoscales with one nanometre resolution and virtually zero thermal expansion give you

extreme measuring accuracy of (0,2+0,1L/100) µm.

• The fixed bridge, moving table construction and high-precision air bearings further improve the

accuracy of your measurements.

• Particularly suitable for workpieces with very small dimensions, such as MEMS parts, integrated

circuits, precision formed components, aspheric lenses.

• Every model of the M-NanoCoord Series has a newly developed ultra-high accuracy main unit

with a vision probe as a standard accessory.

• Can be equipped with micro probe systems as a factory option.

M-NanoCoord

No.

Resolution

[nm]

Range (X, Y, Z-axis) with Vision Head

Accuracy

(1)

M-NanoCoord 1 200 x 200 x 100 mm

1(x,y)

= (0,2+0,1L/100) µm

(1)

According to Mitutoyo inspection method L = measuring length (mm)

Example of an M-NanoCoord-LNP measurement application

Aspherical lens measurement result

Aspherical lens analysis by lens section comparison

Specifications

Main unit Structure

XY-plane guiding structure

Guiding method

Hydrostatic air bearing

Scales

Low-expansion laser holoscale

Vision Head - Programmable Power Turret (PPT)

- 4-quadrant LED (PRL)

- High-sensitivity megapixel CCD camera

Factory

options

- UMAP Probes

Touch signal probe with a micro stylus

(Refer the UMAP page for details)

UMAP 101

ø15µm ; L=0,2 mm

UMAP 103

ø30 µm ; L=2 mm

UMAP 107

ø70 µm ; L=5 mm

UMAP 110

ø100 µm ; L=10 mm

UMAP 130

ø300 µm ; L=16 mm

- LNP "Long-range Nano Probe"

Minute Form Probe

LNP Probe : Long range Nano Probe

LNP allows measurement of minute features on

workpieces such as light guide plates, using a

diamond stylus with tip radius of 2 µm (optional).

LNP allows scanning measurement with steeply-

inclined surfaces of ±80° and touch-probe

measurement of ±90° by vibration-type contact

scanning probe with ultra-low measuring force

(min. measuring force : 10 µN).

648

The prices listed are suggested retail prices (valid until 31st May 2014). All products to be sold to commercial customers. Therefore VAT is not

included. Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications, are only binding

when explicitly agreed upon.

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Mitutoyo QUICK SCOPE 359 SERIES User Manual Page 22

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