Mitutoyo QUICK SCOPE 359 SERIES User Manual download pdf (Page 18)

M-NanoCoord

Specifications

Main

Unit

Structure

XY-plane guiding structure

Guiding method

Hydrostatic air bearing

Scales

Low-expansion laser holoscale

Vision

Head

- Programmable Power Turret (PPT)

- 4-quadrant LED (PRL)

- High-sensitivity megapixel CCD camera

Factory

options

- UMAP Probes (touch signal probe with a

micro stylus)

(Refer the UMAP page for details)

UMAP 101

ø15µm ; L=0,2 mm

UMAP 103

ø30 µm ; L=2 mm

UMAP 107

ø70 µm ; L=5 mm

UMAP 110

ø100 µm ; L=10 mm

UMAP 130

ø300 µm ; L=16 mm

- Minute Form Probe LNP (ultra-low

measuring force, contact-type probe)

Equipped with high performance contact-

type probe system "Long-range Nano Probe"

LNP Probe : Long range Nano Probe

LNP allows measurement of minute features on

workpieces such as light guide plates, using a

diamond stylus with tip radius of 2 µm (optional).

LNP allows scanning measurement with steeply-

inclined surfaces of ±80° and touch-probe

measurement of ±90° by vibration-type contact

scanning probe with ultra-low measuring force

(min. measuring force : 10 µN).

3D CNC Ultra High Resolution Measuring System

• Newly developed measuring machine capable of the most precise movements for unsurpassed

form measurement accuracy in the nanometre region.

• Laser Holoscales with one nanometre resolution and virtually zero thermal expansion provide

extreme measuring accuracy of (0,2+0,1L/100) µm.

• Fixed bridge, moving table construction.

• High-precision air bearings.

•

Particularly suitable for workpieces with very small dimensions, such as MEMS parts, integrated

circuits, precision formed components, aspheric lenses.

• Every model of the M-NanoCoord Series has a newly developed ultra-high accuracy main unit

with a vision probe as a standard accessory.

• Can be equipped with probe systems (factory option).

M-NanoCoord

No. Range (X, Y, Z-axis) Resolution

Accuracy

(1)

M-NanoCoord 200 x 200 x 100 mm 1 nm

1(x,y)

= (0,2+0,1L/100) µm

(1)

According to Mitutoyo inspection method L = measuring length (mm)

Example of an M-NanoCoord-LNP measurement application

Aspherical lens measurement result

Aspherical lens analysis by lens section comparison

The prices listed are suggested retail prices (valid until 31

May 2013). Inch products and combined inch/metric products are generally intended

for sale to the United Kingdom only. All products to be sold to commercial customers. Therefore VAT is not included. Product illustrations are

without obligation. Product descriptions respectively capability characteristics are only binding when explicitly agreed upon. * Please contact

Mitutoyo for more information on delivery times.

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Mitutoyo QUICK SCOPE 359 SERIES User Manual Page 18

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